Reticles are one of the most critical tool used during IC manufacturing process. Reticles are normally manufactured to order. The tooling engineer first integrates customer’s data known as the pattern using CAD software, followed bye-beam(by e-beam) or laser beam writer that prints the circuits onto the photoresist-covered mask blank. After the process of developing, etching and strip, the reticle blank becomes the glass reticle which must go through measurement of critical dimensions(CD), registration and defect inspection to meet customers’ requirements before cleaning and pelliclization for delivery.